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   cmp support...
 
 
 
           


 

contact us about:

consumeables

cmp retaining rings

repair

motor and pcb repair

field Service

service

facilities

installations

legacy

surplus subassemblies
 

 

SPM Technology entered the CMP market in 1995. As both an aftermarket and OEM supplier SPM has expanded its range of materials and services from CMP retaining rings to installations, upgrades and service.

Below are the CMP tools and heads we support. In many cases we offer our customers multiple material and design options to suit their particular needs. Contact us today to discuss your design and material needs.

 
Applied Materials® CMP Polishers
Ebara® CMP Polishers
Novellus® CMP Polishers

AMAT Mirra® 200mm Titan-1

AMAT Mirra® 200mm Titan-2

AMAT Mirra® 200mm Contour

AMAT Reflexion® 300mm

AMAT LK® 300mm

Ebara® 212

Ebara® 222 MPTI

Ebara® FRX

IPEC®372

IPEC® 472

IPEC® 676

IPEC® 776

Momentum®
Strausbaugh® CMP Polishers
LAM® Terrace CMP Polishers
Speedfam®/ Cybeq CMP Polishers

6DSSP®

Viprr® 200mm

Terrace®

Auriga®

Auriga® C

Cybeq®
     
EBARA-FRX-222SP
Rings designed to address low-solids slurry defect issues
Materials that provide 2-2.5X lifetime advantage over PPS
Support and spare components for Ebara® 222 polishers
SMC® upgrade for 200mm Mirra® platforms
   
 
 

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